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Rapid Thermal Processing (RTP) Equipment

Rapid thermal processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. Such rapid heating rates are attained by high intensity lamps or laser process. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.

Temperature Control

One of the key challenges in rapid thermal processing is accurate measurement and control of the wafer temperature. Monitoring the ambient with a thermocouple is not feasible, in that the high temperature ramp rates prevent the wafer from coming to thermal equilibrium with the process chamber. One temperature control strategy involves in situ pyrometry to effect real time control.

Used, Surplus & Refurbished Rapid Thermal Processing (RTP) Equipment in our inventory:

  • Applied Materials
  • Axcelis Technologies
  • Koyo Thermal Systems
  • Mattson Technology
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Contact Information
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    Address
    Avnai Hachushen 13, Kiryat Gat, Israel

  •  

    Phone
    +972 (0)8-86 66 856
    Fax
    +972 (0)8-8668826

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    Email
    info@noam-tech.com

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    Opening hours
    Sunday - Thursday 10:00 - 17:00 (GMT +2)

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